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    Piezoelectric-on-semiconductor Micromechanical Resonators With Linear Acoustic Bandgap Tethers

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    8624471.pdf (527.4Kb)
    Date
    1/7/2014
    Author
    Ayazi, Farrokh
    Sorenson, Logan
    Fu, Jenna
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    Abstract
    Microelectromechanical resonators include a resonator body anchored to a substrate by at least one tether containing a coupled-ring linear acoustic bandgap structure therein. The coupled-ring linear acoustic bandgap structure can include a plurality of piezoelectric-on-semiconductor rings connected together by a plurality of piezoelectric-on-semiconductor tether segments. A first electrode may also be provided, which extends on the resonator body and the coupled-ring linear acoustic bandgap structure. This resonator body, which may be suspended opposite a recess in the substrate, may include a semiconductor (e.g., silicon) body having a piezoelectric layer (e.g., AlN) thereon, which extends between the semiconductor body and the first electrode. The coupled-ring linear acoustic bandgap structure may be a periodic structure, where a pitch between each of the plurality of piezoelectric-on-semiconductor rings in the at least one tether is equivalent, or a non-periodic structure.
    URI
    http://hdl.handle.net/1853/56841
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