Microstructures And Methods Of Fabrication Thereof

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Date
1/28/2014Author
Joseph, Paul Jayachandran
Kohl, Paul A.
Allen, Sue Ann Bidstrup
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Microstructures and methods of fabricating microstructures are disclosed. One exemplary microstructure, among others, includes a substrate, an overcoat layer disposed upon the substrate, an air-region within at least a portion of the overcoat layer, and a framing material layer engaging at least a portion of the air-region on the inside of the framing material layer and engaging the overcoat layer on the outside of the framing material layer.
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- Georgia Tech Patents [1761]