Piezoelectric Nanowire Vibration Sensors

Abstract

A vibration sensor includes a substrate. A first electrical contact and a spaced apart second electrical contact are both disposed on a first surface of the substrate. The elongated piezoelectric nano-scale structure extends outwardly from the first surface of the substrate and is disposed between, and in electrical communication with, the first electrical contact and the second electrical contact. The elongated piezoelectric nano-scale structure is oriented so that a voltage potential exists between the first electrical contact and the second electrical contact when the elongated piezoelectric nano-scale structure is bent from a first state to a second state.