Large-scale Fabrication Of Vertically Aligned Zno Nanowire Arrays

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Date
9/9/2014Author
Wang, Zhong Lin
Hu, Youfan
Zhang, Yan
Xu, Chen
Zhu, Guang
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A generator includes a substrate, a first electrode layer, a dense plurality of vertically-aligned piezoelectric elongated nanostructures, an insulating layer and a second electrode layer. The substrate has a top surface and the first electrode layer is disposed on the top surface of the substrate. The dense plurality of vertically-aligned piezoelectric elongated nanostructures extends from the first electrode layer. Each of the nanostructures has a top end. The insulating layer is disposed on the top ends of the nanostructures. The second electrode layer is disposed on the non-conductive layer and is spaced apart from the nanostructures.
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- Georgia Tech Patents [1761]