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    Vibratory Tuning Fork Based Six-degrees Of Freedom Inertial Measurement Mems Device

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    Date
    4/14/2015
    Author
    Ayazi, Farrokh
    Agrawal, Divyanshu
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    Abstract
    A high-Q, mode-matched, vibratory tuning fork based MEMS device, capable of sensing rotational and translational motion around three axes, and processes of fabrication are disclosed herein. In one embodiment, a MEMS device has first and second proof masses actuated along a first axis, and a third and fourth proof masses actuated along a second orthogonal axis. Each of the proof masses includes an inner mass mechanically coupled to an outer frame. A plurality of electrodes sense rotational or translational motion along the three orthogonal axes.
    URI
    http://hdl.handle.net/1853/56982
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