• Login
    View Item 
    •   SMARTech Home
    • Georgia Tech Patents
    • Georgia Tech Patents
    • View Item
    •   SMARTech Home
    • Georgia Tech Patents
    • Georgia Tech Patents
    • View Item
    JavaScript is disabled for your browser. Some features of this site may not work without it.

    Methods For Growing A Non-phase Separated Group-iii Nitride Semiconductor Alloy

    Thumbnail
    View/Open
    9142413.pdf (916.9Kb)
    Date
    9/22/2015
    Author
    Moseley, Michael William
    Doolittle, William Alan
    Metadata
    Show full item record
    Abstract
    Systems and methods for MBE growing of group-III Nitride alloys, comprising establishing an average reaction temperature range from about 250 C to about 850 C; introducing a nitrogen flux at a nitrogen flow rate; introducing a first metal flux at a first metal flow rate; and periodically stopping and restarting the first metal flux according to a first flow duty cycle. According to another embodiment, the system comprises a nitrogen source that provides nitrogen at a nitrogen flow rate, and, a first metal source comprising a first metal effusion cell that provides a first metal at a first metal flow rate, and a first metal shutter that periodically opens and closes according to a first flow duty cycle to abate and recommence the flow of the first metal from the first metal source. Produced alloys include AlN, InN, GaN, InGaN, and AlInGaN.
    URI
    http://hdl.handle.net/1853/57022
    Collections
    • Georgia Tech Patents [1761]

    Browse

    All of SMARTechCommunities & CollectionsDatesAuthorsTitlesSubjectsTypesThis CollectionDatesAuthorsTitlesSubjectsTypes

    My SMARTech

    Login

    Statistics

    View Usage StatisticsView Google Analytics Statistics
    facebook instagram twitter youtube
    • My Account
    • Contact us
    • Directory
    • Campus Map
    • Support/Give
    • Library Accessibility
      • About SMARTech
      • SMARTech Terms of Use
    Georgia Tech Library266 4th Street NW, Atlanta, GA 30332
    404.894.4500
    • Emergency Information
    • Legal and Privacy Information
    • Human Trafficking Notice
    • Accessibility
    • Accountability
    • Accreditation
    • Employment
    © 2020 Georgia Institute of Technology