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    Acoustically-engineered Multi-port Piezoelectric-on-semiconductor Resonators For Accurate Temperature Sensing And Reference Signal Generation

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    Date
    4/19/2016
    Author
    Tabrizian, Roozbeh
    Ayazi, Farrokh
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    Abstract
    An integrated circuit device includes a multi-port piezoelectric-on-semiconductor microelectromechanical resonator, which is configured to support independent and concurrent piezoelectric transduction of multiple resonance modes. The resonator includes a semiconductor resonator body (e.g., Si body) suspended opposite an underlying recess in a substrate. Opposite ends of the semiconductor resonator body are anchored to the substrate. The resonator body may be formed so that a plan layout view of a portion of the semiconductor resonator body is dumbbell-shaped to thereby support acoustic energy trapping of multiple high-Q resonance modes.
    URI
    http://hdl.handle.net/1853/57076
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    • Georgia Tech Patents [1761]

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