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    Three Dimensional Integrated Circuits With Lift-off

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    5280184.pdf (977.4Kb)
    Date
    1/18/1994
    Author
    Jokerst, Nan M.
    Brooke, Martin A.
    Allen, Mark G.
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    Abstract
    Three dimensional communication within an integrated circuit occurs via electromagnetic communication between emitters and detectors situated throughout the integrated circuit. The emitters and detectors can be produced in a diode or laser configuration. The emitters and detectors can be fabricated via novel lift-off and alignable deposition processes. Integrated circuit layers, including silicon and gallium arsenide, are transparent to the electromagnetic signals propagated from the emitter and received by the detector. Furthermore, arrays of optical detectors can be implemented to perform image processing with tremendous speed. Processing circuitry can be situated directly below the optical detectors to process in massive parallel signals from individual optical detectors.
    URI
    http://hdl.handle.net/1853/57151
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    • Georgia Tech Patents [1761]

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