Method For The Chemical Vapor Deposition Of Group Ib And Group Viiib Metal Barrier Layers

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Date
10/4/1994Author
Lackey, Walter J.
Hanigofsky, John A.
Hill, David N.
Shapiro, Michael J.
Barefield, Kent E.
Carter, William B.
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A method for applying a metal film barrier layer between a substrate and a superconductor coating or over a superconductivity coating using chemical vapor deposition in which low vapor pressure reactants are used, is disclosed, which comprises the steps of providing a substrate and a quantity of metal-bearing reagent and one or more reagents, placing the substrate within the furnace, introducing the metal-bearing reagent by a powder feeder means and then the reagents at different times into and reacting them in the furnace, resulting in the deposition first of a coating of metal onto the substrate and then of a coating consisting essentially of the superconducting reactant components onto the metal film; said reagents generally chosen to yield the group of oxide superconductors.
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- Georgia Tech Patents [1761]