Fully Integrated Micromachined Magnetic Particle Manipulator And Separator

Abstract

A fully integrated micromachined magnetic particle manipulator and separator which can be used to influence magnetic particles suspended in a fluid. The magnetic particle manipulator and separator is integrated on a substrate, preferably a silicon wafer. The magnetic particle manipulator and separator is comprised of a fluid flow channel and integrated inductive components formed on each side of the channel. Each inductive component is comprised of a magnetic core and a conductor coil. Preferably, a meander-type inductor is used. The magnetic cores have ends located adjacent the fluid channel which function as electromagnet poles. When approximately 500 mA of DC current at less than 1 volt is supplied to the circuit, the inductive components produce magnetic fields and the magnetic particles suspended in the fluid clump onto the electromagnet poles. When the current is removed, the magnetic particles are released from the electromagnet poles.