Robust Substrate-based Micromachining Techniques And Their Application To Micromachined Sensors And Actuators
Allen, Mark G.
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The use of robust substrates on the surface micro-machined structures combines (1) the use of micro-machining technology; (2) the use of electronic packaging technologies; and (3) the use of conventional machining techniques to create a new class of micro-machined structures. A particular robust substrate-based micro-machine structure is a capacitive pressure sensor that includes a pressure sensitive diaphragm and an electrode.
- Georgia Tech Patents