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    Robust Substrate-based Micromachining Techniques And Their Application To Micromachined Sensors And Actuators

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    6458618.pdf (286.4Kb)
    Date
    10/1/2002
    Author
    Allen, Mark G.
    Chang, Sung-pil
    Lee, Jeong-bong
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    Abstract
    The use of robust substrates on the surface micro-machined structures combines (1) the use of micro-machining technology; (2) the use of electronic packaging technologies; and (3) the use of conventional machining techniques to create a new class of micro-machined structures. A particular robust substrate-based micro-machine structure is a capacitive pressure sensor that includes a pressure sensitive diaphragm and an electrode.
    URI
    http://hdl.handle.net/1853/57450
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