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dc.date.accessioned2017-05-12T14:27:59Z
dc.date.available2017-05-12T14:27:59Z
dc.date.issued8/24/2004
dc.identifier.urihttp://hdl.handle.net/1853/57538
dc.description.abstractThe cantilever of a probe-based metrology instrument such as an AFM is deflected by directing a beam of ultrasonic energy at the cantilever to apply ultrasonically generated acoustic radiation pressure to the cantilever. The energy is generated by an ultrasonic actuator such as a ZnO transducer driven by a power source such an RF signal generator. The transmitted beam preferably is shaped by focusing, collimation, or the like so that it impinges at least primarily on a region of interest of the cantilever such as the free end. The ultrasonic actuator produces a much better controlled force on the cantilever than can be achieved through the use of a traditional piezoelectric actuator and, accordingly, produces a response free of spurious effects (at least when the cantilever is operating in liquid). It also has a frequency bandwidth in the MHz range.
dc.titleMethod And Apparatus For The Ultrasonic Actuation Of The Cantilever Of A Probe-based Instrument
dc.typePatent
dc.contributor.patentcreatorDegertekin, Levent F.
dc.identifier.patentnumber6779387
dc.description.assigneeGeorgia Tech Research Corporation
dc.identifier.patentapplicationnumber10/095850
dc.date.filed3/12/2002
dc.identifier.uspc73/105
dc.identifier.cpcB82Y35/00
dc.identifier.cpcG01N29/0681
dc.identifier.cpcG01N29/2456


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