Guided-wave Optical Interconnections Embedded Within A Microelectronic Wafer-level Batch Package

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Date
8/31/2004Author
Mule?, (atlanta, Ga)
Patel, Chirag
Meindl, James D.
Gaylord, Thomas K.
Glytsis, Elias N.
Martin, Kevin P.
Schultz, Stephen M.
Bakir, Muhannad
Reed, Hollie
Kohl, Paul
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Show full item recordAbstract
Wafer-level electronic packages having waveguides and methods of fabricating chip-level electronic packages having waveguides are disclosed. A representative chip-level electronic package includes at least one waveguide having a waveguide core. In addition, another representative chip-level electronic package includes a waveguide having an air-gap cladding layer around a portion of the waveguide core. A representative method for fabricating a chip-level electronic package includes: providing a substrate having a passivation layer disposed on the substrate; disposing a waveguide core on a portion of the passivation layer; disposing a first sacrificial layer onto at least one portion of the passivation layer and the waveguide core; disposing an overcoat layer onto the passivation layer and the first sacrificial layer; and removing the first sacrificial layer to define an air-gap cladding layer within the overcoat polymer layer and around a portion of the waveguide core.
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- Georgia Tech Patents [1761]