Gas-expanded Liquids, Methods Of Use Thereof, And Systems Using Gas-expanded Liquids For Cleaning Integrated Circuits
Spuller, Matthew T.
Hess, Dennis W.
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Gas-expanded liquids, methods of use thereof, and systems of using gas-expanded liquids are provided. One exemplary system, among others, includes: a gas-expanded liquid system comprising a gas and a liquid, wherein the gas-expanded liquid system is adapted to generate a gas-expanded liquid; and a substrate handling system adapted to position a substrate having a photoresist layer so that the gas-expanded liquid can be made to contact the substrate to remove the photoresist layer.
- Georgia Tech Patents