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    Optical Waveguides With Embedded Air-gap Cladding Layer And Methods Of Fabrication Thereof

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    6807352.pdf (492.0Kb)
    Date
    10/19/2004
    Author
    Mule', Tony
    Meindl, James D.
    Gaylord, Thomas K.
    Glytsis, Elias N.
    Kohl, Paul
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    Abstract
    Waveguides having air-gap cladding layers and methods of fabricating waveguides having air-gap cladding layers are disclosed. A representative waveguide includes a waveguide core having an air-gap cladding layer engaging a portion of the waveguide core. In addition, a representative method of fabricating a waveguide having an air-gap cladding layer includes: providing a substrate having a lower cladding layer disposed on the substrate; disposing a waveguide core on a portion of the lower cladding layer; disposing a sacrificial layer onto at least one portion of the lower cladding layer and the waveguide core; disposing an overcoat layer onto the lower cladding layer and the sacrificial layer; and removing the sacrificial layer to define an air-gap cladding layer within the overcoat polymer layer and engaging a portion of the waveguide core.
    URI
    http://hdl.handle.net/1853/57545
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