Porous Gas Sensors And Method Of Preparation Thereof

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Date
5/17/2005Author
Gole, James L.
Seals, Lenward T.
Hesketh, Peter J.
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Show full item recordAbstract
A sensor is disclosed. A representative sensor includes a silicon substrate having a porous silicon region. A portion of the porous silicon region has a front contact is disposed thereon. The contact resistance between the porous silicon region and the front contact is between about 10 ohms and 100 ohms.
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- Georgia Tech Patents [1761]