dc.date.accessioned | 2017-05-12T14:28:10Z | |
dc.date.available | 2017-05-12T14:28:10Z | |
dc.date.issued | 3/21/2006 | |
dc.identifier.uri | http://hdl.handle.net/1853/57610 | |
dc.description.abstract | In a method of making graphite devices, a preselected crystal face of a crystal is annealed to create a thin-film graphitic layer disposed against selected face. A preselected pattern is generated on the thin-film graphitic layer. A functional structure includes a crystalline substrate having a preselected crystal face. A thin-film graphitic layer is disposed on the preselected crystal face. The thin-film graphitic layer is patterned so as to define at least one functional structure. | |
dc.title | Patterned Thin Film Graphite Devices And Method For Making Same | |
dc.type | Patent | |
dc.contributor.patentcreator | Deheer, Walt A. | |
dc.contributor.patentcreator | Berger, Claire | |
dc.contributor.patentcreator | First, Phillip N. | |
dc.identifier.patentnumber | 7015142 | |
dc.description.assignee | Georgia Tech Research Corporation | |
dc.identifier.patentapplicationnumber | 10/860710 | |
dc.date.filed | 6/3/2004 | |
dc.identifier.uspc | 438/689 | |
dc.identifier.cpc | H01L21/0405 | |
dc.identifier.cpc | H01L21/0445 | |
dc.identifier.cpc | H01L29/16 | |