• Login
    View Item 
    •   SMARTech Home
    • Georgia Tech Patents
    • Georgia Tech Patents
    • View Item
    •   SMARTech Home
    • Georgia Tech Patents
    • Georgia Tech Patents
    • View Item
    JavaScript is disabled for your browser. Some features of this site may not work without it.

    High-resolution In-plane Tuning Fork Gyroscope And Methods Of Fabrication

    Thumbnail
    View/Open
    7043985.pdf (514.5Kb)
    Date
    5/16/2006
    Author
    Ayazi, Farrokh
    Zaman, Mohammad Faisal
    Metadata
    Show full item record
    Abstract
    A microstructure comprising an in-plane solid-mass electrically conductive tuning fork gyroscope and fabrication methods. The gyroscope is formed using substrate material having lower and upper layers sandwiching a sacrificial insulating layer. An exemplary gyroscope comprises a low-resistivity single-crystal silicon substrate having a lower support layer and an upper flexible support layer. Two opposed proof masses that are separated from the lower support layer lie in and are supported by the upper flexible support layer. Two drive electrodes are disposed adjacent to the proof masses and are insulatably supported by the lower support layer and are separated from the upper flexible support layer. Sense, balance and tuning electrodes are disposed adjacent to the proof masses and are insulatably supported by the lower support layer and are separated from the upper flexible support layer. The operational mode shapes are in-plane with the substrate surface and only measures angular motion that are orthogonal to the plane of the substrate. The microstructure flexural design enables the sense and the drive resonant frequencies to occur in close proximity of one another. This enables matched-mode operation of the device thereby ensuring maximum sensitivity.
    URI
    http://hdl.handle.net/1853/57622
    Collections
    • Georgia Tech Patents [1761]

    Browse

    All of SMARTechCommunities & CollectionsDatesAuthorsTitlesSubjectsTypesThis CollectionDatesAuthorsTitlesSubjectsTypes

    My SMARTech

    Login

    Statistics

    View Usage StatisticsView Google Analytics Statistics
    facebook instagram twitter youtube
    • My Account
    • Contact us
    • Directory
    • Campus Map
    • Support/Give
    • Library Accessibility
      • About SMARTech
      • SMARTech Terms of Use
    Georgia Tech Library266 4th Street NW, Atlanta, GA 30332
    404.894.4500
    • Emergency Information
    • Legal and Privacy Information
    • Human Trafficking Notice
    • Accessibility
    • Accountability
    • Accreditation
    • Employment
    © 2020 Georgia Institute of Technology