Micromachined Device Having Electrically Isolated Components And A Method For Making The Same
Allen, Mark G.
Chung, Charles C.
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A micromachined structure having electrically isolated components is formed by thermomigrating a dopant through a substrate to form a doped region within the substrate. The doped region separates two portions of the substrate. The dopant is selected such that the doped region electrically isolates the two portions of the substrate from each other via junction isolation.
- Georgia Tech Patents