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    Surface Micromachined Millimeter-scale RF System And Method

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    7196666.pdf (614.0Kb)
    Date
    3/27/2007
    Author
    Allen, Mark G.
    Yoon, Yong-kyu
    Park, Jin-woo
    Joung, Yeun-ho
    Cros, Florent
    Papapolymerou, Ioannis
    Tentzeris, Emmanouil
    Pan, Bo
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    Abstract
    A surface micromachined electromagnetically radiating antenna includes a coplanar waveguide on a ground plane coated substrate having a conductor path. The conductor path is coupled to a monopole conductor, which has a generally-cylindrical backbone erected vertically from the substrate and a metal layer deposited on the backbone at a predetermined thickness. The antenna may be fabricated by depositing an epoxy on the ground plane coated substrate to a predetermined depth and according to a pattern. The epoxy is exposed to an ultraviolet source that develops one or more columns according to the pattern. A seed layer of metal may be formed on the developed column. A conductive metal is electrodeposited over the column surface to produce the monopole antenna. Other antenna may be created by adding monopoles and/or conductive metal patches and/or strips that are positioned atop the monopoles and elevated from the substrate.
    URI
    http://hdl.handle.net/1853/57678
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