Surface Micromachined Millimeter-scale RF System And Method

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Date
3/27/2007Author
Allen, Mark G.
Yoon, Yong-kyu
Park, Jin-woo
Joung, Yeun-ho
Cros, Florent
Papapolymerou, Ioannis
Tentzeris, Emmanouil
Pan, Bo
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A surface micromachined electromagnetically radiating antenna includes a coplanar waveguide on a ground plane coated substrate having a conductor path. The conductor path is coupled to a monopole conductor, which has a generally-cylindrical backbone erected vertically from the substrate and a metal layer deposited on the backbone at a predetermined thickness. The antenna may be fabricated by depositing an epoxy on the ground plane coated substrate to a predetermined depth and according to a pattern. The epoxy is exposed to an ultraviolet source that develops one or more columns according to the pattern. A seed layer of metal may be formed on the developed column. A conductive metal is electrodeposited over the column surface to produce the monopole antenna. Other antenna may be created by adding monopoles and/or conductive metal patches and/or strips that are positioned atop the monopoles and elevated from the substrate.
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- Georgia Tech Patents [1761]