Direct Write Nanolithography Using Heated Tip
King, William P.
Henderson, Clifford L.
MetadataShow full item record
A device for sculpting a substrate includes a vertically displaceable probe having a nano-scale dimensioned probe tip. A displacement mechanism is configured to adjust a vertical displacement between the probe tip and the substrate. A heating mechanism selectively heats the probe tip to a preselected temperature that is sufficient to cause a portion of the substrate in contact with the probe tip to decompose.
- Georgia Tech Patents