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    Inspection Systems And Methods

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    7492449.pdf (700.0Kb)
    Date
    2/17/2009
    Author
    Ume, Ifeanyi Charles
    Zhang, Lizheng
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    Abstract
    Embodiments of inspection systems and methods are disclosed. One embodiment of an inspection system, among others, comprises logic configured to receive a reference signal and a target signal, the reference signal having first surface displacement information and the target signal having second surface displacement information, said logic configured to determine a correlation coefficient between the first surface displacement information and the second surface displacement information, the correlation coefficient indicating whether an inspected object exhibits a defect.
    URI
    http://hdl.handle.net/1853/57788
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