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dc.date.accessioned2017-05-12T14:28:38Z
dc.date.available2017-05-12T14:28:38Z
dc.date.issued2/17/2009
dc.identifier.urihttp://hdl.handle.net/1853/57788
dc.description.abstractEmbodiments of inspection systems and methods are disclosed. One embodiment of an inspection system, among others, comprises logic configured to receive a reference signal and a target signal, the reference signal having first surface displacement information and the target signal having second surface displacement information, said logic configured to determine a correlation coefficient between the first surface displacement information and the second surface displacement information, the correlation coefficient indicating whether an inspected object exhibits a defect.
dc.titleInspection Systems And Methods
dc.typePatent
dc.contributor.patentcreatorUme, Ifeanyi Charles
dc.contributor.patentcreatorZhang, Lizheng
dc.identifier.patentnumber7492449
dc.description.assigneeGeorgia Tech Research Corporation
dc.identifier.patentapplicationnumber11/086473
dc.date.filed3/22/2005
dc.identifier.uspc356/237.1
dc.identifier.cpcG01N21/95607
dc.identifier.cpcG01N21/95684


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