Integrated Displacement Sensors For Probe Microscopy And Force Spectroscopy
Degertekin, Levent F.
Onaran, Abidin Guclu
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In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure and the detection surface, wherein the flexible mechanical structure is configured to deflect upon exposure to an external force, thereby changing the first distance.
- Georgia Tech Patents