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dc.date.accessioned2017-05-12T14:28:48Z
dc.date.available2017-05-12T14:28:48Z
dc.date.issued7/13/2010
dc.identifier.urihttp://hdl.handle.net/1853/57863
dc.description.abstractAn atomic force microscope sensing structure includes a substrate, a flexible membrane and an actuating element. The flexible membrane has a first end that is clamped to the substrate and an opposite second end that is clamped to the substrate. A central portion of the membrane and the substrate define a first gap width therebetween. A peripheral portion of the membrane and the substrate define a second gap width therebetween. The first gap width is different from the second gap width. The actuating element is disposed at least adjacent to the first end and the second end and is configured to displace the membrane relative to the substrate.
dc.titleDevices For Probe Microscopy
dc.typePatent
dc.contributor.patentcreatorDegertekin, Fahrettin L.
dc.identifier.patentnumber7752898
dc.description.assigneeGeorgia Tech Research Corporation
dc.identifier.patentapplicationnumber11/838833
dc.date.filed8/14/2007
dc.identifier.uspc73/105
dc.identifier.cpcB82Y35/00
dc.identifier.cpcG01Q60/38
dc.identifier.cpcG01Q20/04


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