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dc.date.accessioned2017-05-12T14:28:58Z
dc.date.available2017-05-12T14:28:58Z
dc.date.issued2/15/2011
dc.identifier.urihttp://hdl.handle.net/1853/57927
dc.description.abstractA micro-electromechanical resonator self-compensates for process-induced dimensional variations by using a resonator body having a plurality of perforations therein. These perforations may be spaced along a longitudinal axis of the resonator body, which extends orthogonal to a nodal line of the resonator body. These perforations, which may be square or similarly-shaped polygonal slots, may extend partially or entirely though the resonator body and may be defined by the same processes that are used to define the outer dimensions (e.g., length, width) of the resonator body.
dc.titleThin-film Piezoelectric-on-insulator Resonators Having Perforated Resonator Bodies Therein
dc.typePatent
dc.contributor.patentcreatorAyazi, Farrokh
dc.contributor.patentcreatorSorenson, Logan D.
dc.identifier.patentnumber7888843
dc.description.assigneeGeorgia Tech Research Corporation
dc.identifier.patentapplicationnumber12/535284
dc.date.filed8/4/2009
dc.identifier.uspc310/324
dc.identifier.cpcH03B5/326
dc.identifier.cpcH03H9/02259
dc.identifier.cpcH03H9/172


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