Micromechanical Bulk Acoustic Mode Resonators Having Interdigitated Electrodes And Multiple Pairs Of Anchor Supports
Ho, Gavin Kar-fal
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A micromechanical resonator operable in a bulk acoustic mode includes a resonator apparatus suspended over a substrate by a plurality of pairs of anchors. The resonator apparatus includes a conductive metal layer, a piezoelectric layer on the conductive metal layer and a plurality of interdigitated electrodes on the piezoelectric layer. The interdigitated electrodes are configured so that a total number of electrode fingers in the plurality of interdigitated electrodes is greater than a total number of the plurality of pairs of anchors.
- Georgia Tech Patents