Multiple Element Electrode Cmut Devices And Fabrication Methods
Degertekin, Levent F.
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Multiple electrode element capacitive micromachined ultrasonic transducer (�cMUT�) devices and fabrication methods are provided. A cMUT device generally comprises a top electrode disposed within a membrane, a bottom electrode disposed on a substrate, and a cavity between the membrane and the bottom electrode. In a preferred embodiment of the present invention, at least one of the first electrode and the second electrode comprises a plurality of electrode elements. The electrode elements can be positioned and energized to shape the membrane and efficiently transmit and receive ultrasonic energy, such as ultrasonic waves. Other embodiments are also claimed and described.
- Georgia Tech Patents