Integrated Circuit Oscillators Having Microelectromechanical Resonators Therein With Parasitic Impedance Cancellation

Abstract

An integrated circuit oscillator includes a microelectromechanical (MEM) resonator having input and output terminals. An oscillation sustaining circuit is provided. The oscillation sustaining circuit is electrically coupled between the input and output terminals of the microelectromechanical resonator. The oscillation sustaining circuit includes a sustaining amplifier and a negative impedance circuit electrically coupled to the sustaining amplifier. The negative impedance circuit is configured to increase a tuning range of the oscillator by at least partially cancelling a parasitic shunt capacitance associated with the microelectromechanical resonator.