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    Mems Resonators Having Resonator Bodies Therein With Concave-shaped Sides That Support High Quality Factor And Low Temperature Coefficient Of Resonant Frequency

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    Date
    11/22/2011
    Author
    Ayazi, Farrokh
    Samarao, Ashwin
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    Abstract
    A microelectromechanical (MEMs) resonator includes a concave bulk acoustic resonator (CBAR). One embodiment of a CBAR includes a substrate and a resonator body suspended over the substrate by a pair of fixed supports that attach to first and second opposing ends of the resonator body. The resonator body has a first concave-shaped side extending between the first and second ends of the resonator body and a second concave-shaped side extending opposite the first concave-shaped side. The resonator body may be configured to have a minimum spacing of λ/2 between the first and second concave-shaped sides, where λ is a wavelength associated with a resonant frequency of said resonator body.
    URI
    http://hdl.handle.net/1853/58008
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