Piezoelectric And Piezoresistive Cantilever Sensors

Abstract

An apparatus for sensing a target substance includes a substrate, an elongated electroactive cantilever, a functional layer and an electrical sensor. The elongated electroactive cantilever includes a first surface and an opposite second surface. The elongated electroactive cantilever includes an electroactive member extending outwardly from the substrate. The functional layer is applied to the first surface and includes a material that reacts with the target substance so that when the functional layer is in the presence of the target substance, the functional layer will cause a change in an electrical property of the electroactive cantilever. The electrical sensor is coupled to the electroactive cantilever and is configured to sense the electrical property of the electroactive cantilever.