Fast Microscale Actuators For Probe Microscopy
Degertekin, Fahrettin Levent
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A system for measuring a property of a sample includes an actuation device disposed on a substrate and includes a flexible surface spaced apart from the substrate and configured so as to allow placement of the sample thereupon. The actuation device also includes a vertical actuator that is configured to cause the flexible surface to achieve a predetermined displacement from the substrate when a corresponding potential is applied thereto. A sensing probe is disposed so as to be configured to interact with the sample thereby sensing the property of the sample.
- Georgia Tech Patents