Advances in low-k and transient polymers

Abstract

This work focuses on directly photodefinable polymeric materials with lower dielectric constants and improved lithographic properties. Two materials were investigated. One material uses diazonaphthoquinone as the photo active compound with a polynobornene backbone polymer matrix. Epoxy was used to mitigate base uptake and allow cross-linking through both the multi-functional epoxy and the bis(diazonaphthoquinone). The second material uses low ceiling temperature polyaldehydes for packaging applications that have catalytic responses to small triggers. An in-situ NMR method for determining thermodynamic variables of low ceiling temperature polymers was established. The choice of polyaldehyde monomers was also considered for use in dry-developing applications. The dry-developing phenomenon will be utilized for the triggered disappearance of a polymer in a printed wiring board.