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Chemical Application of Silicon-Based Resonant Microsensor
(Georgia Institute of Technology, 2007-05-31)
The detection of volatile organic compounds in liquid is of interest for applications in public health, workplace safety and environmental monitoring. Traditionally, water samples were taken and analyzed in the laboratory ...
Monitoring and Control of Semiconductor Manufacturing Using Acoustic Techniques
(Georgia Institute of Technology, 2003-11-25)
Since semiconductor fabrication processes require numerous steps, cost and yield are critical concerns. In-situ monitoring is therefore vital for process control. However, this goal is currently restricted by the shortage ...
Low Power Reconfigurable Microwave Circuts Using RF MEMS Switches for Wireless Systems
(Georgia Institute of Technology, 2005-05-31)
This dissertation presents the research on several different projects. The first project is a via-less CPW RF probe pad to microstrip transition; The second, the third, and the fourth one are reconfigurable microwave ...
Microfrabricated Acoustic and Thermal Field-Flow Fractionation Systems
(Georgia Institute of Technology, 2004-12-17)
Arguments for miniaturization of a thermal field-flow fractionation system ( and #956;-ThFFF) and fabrication of a micro-scale acoustic field-flow fractionation system ( and #956;-AcFFF) using similar methods was presented. ...
Magnetic Machines for Microengine Power Generation
(Georgia Institute of Technology, 2004-11-21)
This dissertation presents an investigation of miniaturized magnetic induction and permanent magnet (PM) machines, intended for use in a microengine. Similar to a macroscale turbogenerator, a microengine comprises a small, ...
Probe Modules for Wafer-Level Testing of Gigascale Chips with Electrical and Optical I/O Interconnects
(Georgia Institute of Technology, 2006-07-10)
The use of optical input/output (I/O) interconnects, in addition to electrical I/Os, is a promising approach for achieving high-bandwidth, chip-to-board communications required for future high-performance gigascale chip-based ...
Piezo-on-Silicon Microelectromechanical Resonators
(Georgia Institute of Technology, 2004-07-12)
This thesis reports on the use of sputter-deposited zinc-oxide as a transduction mechanism to actuate and sense single crystal silicon (SCS) microelectromechanical (MEMS) resonators. Low frequency prototypes of piezo-on-silicon ...
A micromachined magnetic field sensor for low power electronic compass applications
(Georgia Institute of Technology, 2007-04-09)
A micromachined magnetic field sensing system capable of measuring the direction of the Earths magnetic field has been fabricated, measured, and characterized. The system is composed of a micromachined silicon resonator ...
Electrically Coupled MEMS Bandpass Filters
(Georgia Institute of Technology, 2004-04-12)
This dissertation reports, for the first time, on the electrical coupling of microelectromechanical (MEM) resonators for high order bandpass filter synthesis. Electrical coupling of MEM resonators has a strong potential ...
High Aspect-Ratio Nanoscale Etching in Silicon using Electron Beam Lithography and Deep Reactive Ion Etching (DRIE) Technique
(Georgia Institute of Technology, 2006-07-05)
This thesis reports the characterization and development of nanolithography using Electron Beam Lithography system and nanoscale plasma etching. The standard Bosch process and a modified three-pulse Bosch process were ...