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dc.contributor.advisorAyazi, Farrokh
dc.contributor.authorLiu, Chang-Shun
dc.date.accessioned2020-05-20T16:57:38Z
dc.date.available2020-05-20T16:57:38Z
dc.date.created2019-05
dc.date.issued2019-04-01
dc.date.submittedMay 2019
dc.identifier.urihttp://hdl.handle.net/1853/62688
dc.description.abstractThe main objective of this research is to develop temperature and frequency stabilization techniques for silicon MEMS oven-controlled crystal oscillators (MEMS OCXO) with high-frequency stability. The device was built upon an ovenized platform that used a micro-heater to adjust the temperature of the resonator. Structural resistance-based (Rstruc) temperature sensing was used to improve the self-temperature monitoring accuracy of the silicon MEMS resonator. An analog feedback micro-oven control loop and a feedforward digital calibration scheme were developed for a 77MHz MEMS oscillator, which achieved a ±0.3ppm frequency stability from -25°C to 85°C. An AC heating scheme was also developed to enable tighter integration of the resonator, temperature sensor (Rstruc) and heaters. This temperature stabilization technique was also applied to silicon MEMS mode-matched vibratory x/y-axis and z-axis gyroscopes on a single chip. The temperature-induced frequency change, scale factor and output bias variations were all reduced significantly. The complete interface circuit for the single-chip three axes gyroscopes were also developed with an innovative trans-impedance amplifier to reduce the input-referred noise. For the first time, the simultaneous operation of mode-matched vibratory 3-axis MEMS gyroscopes on a single chip was demonstrated.
dc.format.mimetypeapplication/pdf
dc.language.isoen_US
dc.publisherGeorgia Institute of Technology
dc.subjectMEMS
dc.subjectTemperature stabilization
dc.subjectOvenization
dc.subjectGyroscopes
dc.titleAdvanced single-chip temperature stabilization system for silicon MEMS resonators and gyroscopes
dc.typeDissertation
dc.description.degreePh.D.
dc.contributor.departmentElectrical and Computer Engineering
thesis.degree.levelDoctoral
dc.contributor.committeeMemberRaychowdhury, Arijit
dc.contributor.committeeMemberWang, Hua
dc.contributor.committeeMemberCressler, John D.
dc.contributor.committeeMemberHesketh, Peter J.
dc.date.updated2020-05-20T16:57:38Z


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