Fundamentals of Photomask Design
Hollerbach, Benjamin (Ben) P.
MetadataShow full item record
The creation of a photomask set is the first step to producing any variety of semiconductor devices. Thinking through how each mask will be used and the processing steps around them will ensure a smoother process flow and greater device yield. A brief overview of the terminology, technology, techniques around photomask design & creation, and the tools needed to evaluate and fabricate a successful photomask set will be presented.
- IEN Seminars