Metrology of High Aspect Ratio MEMS

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Title: Metrology of High Aspect Ratio MEMS
Author: Nichols, James Franklin
Abstract: Current Status of Software Platform to analyze both 2-D and 3-D CAD models and point clouds
Type: Presentation
Date: 2003-10-15
Publisher: Georgia Institute of Technology
Subject: Sustainability
Point clouds
LIGA metrology

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